DIN 50441-3-1985 半导体工艺材料的检验.第3部分:半导体切片几何尺寸的测量.第3部分:用多射线干涉法测定抛光切片的平面偏差

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【英文标准名称】:Testingofmaterialsforsemiconductortechnology;measurementofthegeometricdimensionsofsemiconductorslices;determinationofflatnessdeviationofpolishedslicesbymeansofthemultiplebeaminterference
【原文标准名称】:半导体工艺材料的检验.第3部分:半导体切片几何尺寸的测量.第3部分:用多射线干涉法测定抛光切片的平面偏差
【标准号】:DIN50441-3-1985
【标准状态】:作废
【国别】:德国
【发布日期】:1985-09
【实施或试行日期】:
【发布单位】:德国标准化学会(DE-DIN)
【起草单位】:
【标准类型】:()
【标准水平】:()
【中文主题词】:定义;测量;半导体工程;检验;平面度测量;干涉测量法;半导体器件;平整度;表面;半导体;半导体工艺;试验设备;光学测量;误差;精整;几何;试验;材料
【英文主题词】:Definition;Definitions;Errors;Finishes;Flatnessmeasurement;Flatness(surface);Geometry;Inspection;Interferometry;Materials;Measurement;Opticalmeasurement;Semiconductordevices;Semiconductorengineering;Semiconductortechnology;Semiconductors;Surfaces;Testequipment;Testing
【摘要】:
【中国标准分类号】:H82
【国际标准分类号】:29_045
【页数】:5P;A4
【正文语种】:德语


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Product Code:SAE ARP419
Title:Automatic Pilot Installations
Issuing Committee:A-4 Aircraft Instruments Committee
Scope:This Aeronautical Recommended Practice is intended to outline Automatic Pilot installation design, performance, and test recommendations for guide by the aircraft industry. These recommendations cover the mechanical and electrical installation and installation test procedures for automatic pilots of the type normally used in transport type aircraft. The material in this ARP does not supersede any airworthiness requirement in the Civil Air Regulations.【英文标准名称】:StandardPracticeforDosimetryinanElectronBeamFacilityforRadiationProcessingatEnergiesBetween80and300keV
【原文标准名称】:能量在80-300Kev的辐射加工用电子束设备的剂量测定的标准实施规程
【标准号】:ASTMISO/ASTM51818-2009
【标准状态】:现行
【国别】:美国
【发布日期】:2009
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E10.01
【标准类型】:(ISO/ASTM)
【标准水平】:()
【中文主题词】:
【英文主题词】:absorbeddose;dosimeter;dosimetrysystem;electronbeam;electronbeamaccelerator;ionizingradiation;radiationprocessing;radiationcrosslinking;radiationcuring;ICS
【摘要】:4.1Avarietyofirradiationortreatmentprocessesuselowenergyelectronprocessorstomodifyproductcharacteristics.Dosimetryrequirements,thenumberandfrequencyofmeasurements,andrecordkeepingrequirementswillvarydependingonthetypeandenduseoftheproductsbeingprocessed.Dosimetrymeasurementsareoftenusedinconjunctionwithphysical,chemical,orbiologicaltestingoftheproduct,tohelpverifyspecifictreatmentparameters.NOTE1-Inmanycasesreferencedatamaybedeveloped,comparingdosimetryresultswithotherquantitativeproducttesting;forexample,gelfraction,meltflow,modulus,molecularweightdistribution,orcureanalysistestscanbeusedtoestimateradiationdoseinspecificrelevantmaterials.4.2Radiationprocessingspecificationsusuallyincludeaminimumormaximumabsorbeddoselimit,orboth.Foragivenapplicationtheselimitsmaybesetbygovernmentregulationorbylimitsinherenttotheproductitself.4.3Criticalprocessparametersmustbecontrolledtoobtainreproducibledosedistributioninprocessedmaterials.Theelectronbeamenergy(ineVorkeV),beamcurrent(inmA),spatialdistributionofthebeam,andexposuretimeorprocesslinespeedallaffectabsorbeddose.NOTE2-Insomeliquid-to-solidpolymerizationapplications(oftenreferredtoasradiationcuring),theresidualoxygenlevelduringirradiationmustbecontrolledtoachieveconsistentresults.Ahighlevelofresidualoxygencanaffectproductperformanceinthesecuringapplications,butdoesnotaffecttheabsorbeddose.However,oxygeneffectsontheresponsefunctionofthedosimeterusedinthemeasurementofdoseshouldbetakenintoaccount.4.4Beforeanyradiationprocesssystemcanbeutilized,itmustbevalidatedtodetermineitseffectiveness.Thisinvolvestestingoftheprocessequipment,calibratingthemeasuringinstruments,anddemonstratingtheabilitytodeliverthedesireddosewithinthedesireddoserangeinareliableandreproduciblemanner.1.1Thispracticecoversdosimetricprocedurestobefollowedtodeterminetheperformanceoflowenergy(300keVorless)single-gapelectronbeamradiationprocessingfacilities.Otherpracticesandproceduresrelatedtofacilitycharacterization,productqualification,androutineprocessingarealsodiscussed.1.2Theelectronenergyrangecoveredinthispracticeisfrom80keVto300keV.Suchelectronbeamscanbegeneratedbysingle-gapself-containedthermalfilamentorplasmasourceaccelerators.1.3Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:
【国际标准分类号】:
【页数】:8P.;A4
【正文语种】:英语